Influence of overpolish time on the performance of W-damascene technology

H. van Kranenburg, P.H. Woerlee

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the Chemical-Mechanical Polish for ULSI Multilevel Interconnection Conference (CMP-MIC)
    Place of PublicationSanta Clara, California, USA
    Publication statusPublished - 13 Feb 1997


    • METIS-113855

    Cite this