Influence of overpolish time on the performance of W-damascene technology

H. van Kranenburg, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Chemical-Mechanical Polish for ULSI Multilevel Interconnection Conference (CMP-MIC)
Place of Publication	Santa Clara, California, USA
Pages	91-98
Publication status	Published - 13 Feb 1997

Keywords

@inproceedings{e39e4f6957dc4aaab9f3a1b4a974627e,

title = "Influence of overpolish time on the performance of W-damascene technology",

keywords = "METIS-113855",

author = "{van Kranenburg}, H. and P.H. Woerlee",

year = "1997",

month = feb,

day = "13",

language = "Undefined",

pages = "91--98",

booktitle = "Proceedings of the Chemical-Mechanical Polish for ULSI Multilevel Interconnection Conference (CMP-MIC)",

}

Influence of overpolish time on the performance of W-damascene technology. / van Kranenburg, H.; Woerlee, P.H.
Proceedings of the Chemical-Mechanical Polish for ULSI Multilevel Interconnection Conference (CMP-MIC). Santa Clara, California, USA, 1997. p. 91-98.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Influence of overpolish time on the performance of W-damascene technology

AU - van Kranenburg, H.

AU - Woerlee, P.H.

PY - 1997/2/13

Y1 - 1997/2/13

KW - METIS-113855

M3 - Conference contribution

SP - 91

EP - 98

BT - Proceedings of the Chemical-Mechanical Polish for ULSI Multilevel Interconnection Conference (CMP-MIC)

CY - Santa Clara, California, USA

ER -