Influence of process parameters on the distribution of single shot correlation coefficient obtained by correlation LIB-Spectra

M. Lentjes, K. Dickmann, J. Meijer

    Research output: Contribution to journalArticleAcademicpeer-review

    8 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)661-666
    Number of pages6
    JournalApplied physics A: Materials science and processing
    Volume88
    Issue number4
    Publication statusPublished - 2007

    Keywords

    • METIS-239830

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