Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT

H. Nazeer, L.A. Woldering, Leon Abelmann, Duc Minh Nguyen, Augustinus J.H.M. Rijnders, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this work we show for the first time that the effective in-plane Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films, deposited by pulsed laser deposition (PLD) on dedicated single crystal silicon cantilevers, is independent of the in-plane orientation of cantilevers.
Original languageUndefined
Title of host publicationProceedings of the 36th International Micro & Nano Engineering Conference (MNE 2010)
Place of PublicationGenoa, Italy
PublisherMNE 2010 Organisation
Pages-
Number of pages1
ISBN (Print)not assigned
Publication statusPublished - Sept 2010
Event36th International Conference on Micro & Nano Engineering, MNE 2010 - Genoa, Italy
Duration: 19 Sept 2010 → 22 Sept 2010
Conference number: 36

Publication series

Name
PublisherMNE 2010 Organisation

Conference

Conference36th International Conference on Micro & Nano Engineering, MNE 2010
Abbreviated titleMNE
Country/TerritoryItaly
CityGenoa
Period19/09/10 → 22/09/10

Keywords

  • METIS-281523
  • Cantilever
  • IR-74553
  • Orientation
  • PZT
  • EWI-18729
  • Pulsed laser deposition
  • Young’s modulus
  • TST-SMI: Formerly in EWI-SMI
  • TST-uSPAM: micro Scanning Probe Array Memory
  • Resonance frequency

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