Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT

H. Nazeer, L.A. Woldering, Leon Abelmann, Duc Minh Nguyen, Augustinus J.H.M. Rijnders, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

84 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT'. Together they form a unique fingerprint.