Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films

H. Nazeer, L.A. Woldering, Leon Abelmann, Duc Minh Nguyen, Augustinus J.H.M. Rijnders, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

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