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Influence of temperature on the crystal habit of silicon in the SiHCl CVD system I. Experimental results
J. G.E. Gardeniers*, W. E.J.R. Maas, R. Z.C. Van Meerten, L. J. Giling
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
36
Citations
(Scopus)