In order to study the homoepitaxial growth of SrTiO3, several techniques have been used to obtain atomically flat surfaces. Here, the effect of annealing in an oxygen environment and etching in a buffered HF solution on the surface morphology is studied by atomic force microscopy and reflection high-energy electron diffraction. We will show the effect of these substrate treatments on the initial growth of SrTiO3.
|Number of pages||4|
|Journal||Materials Science and Engineering B: Solid-State Materials for Advanced Technology|
|Publication status||Published - 1998|