Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors

Viacheslav Medvedev, Andrey Yakshin, Robbert Wilhelmus Elisabeth van de Kruijs, V.M. Krivtsun, A.M. Yakunin, K.N. Koshelev, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)

Abstract

An extreme ultraviolet multilayer mirror with an integrated spectral filter for the IR range is presented and experimentally evaluated. The system consists of an IR-transparent B4C/Si multilayer stack which is used both as EUV-reflective coating and as a phase shift layer of the resonant IR antireflective (AR) coating. The AR coating is optimized in our particular case to suppress CO2 laser radiation at a wavelength of 10.6 μm, and a suppression of more than two orders of magnitude is demonstrated. The method allows high suppression over a large angular acceptance range, relevant for application in lithography systems.
Original languageEnglish
Pages (from-to)1169-1171
Number of pages3
JournalOptics letters
Volume37
Issue number7
DOIs
Publication statusPublished - 1 Apr 2012

Keywords

  • METIS-310442
  • IR-95817

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