Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors

V.V. Medvedev, A.J.R. van den Boogaard, R. van der Meer, A.E. Yakshin, E. Louis, V.M. Krivtsun, F. Bijkerk

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18 Citations (Scopus)
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We report on the development of a hybrid mirror realized by integrating an EUV-reflecting multilayer coating with a lamellar grating substrate. This hybrid irror acts as an efficient Bragg reflector for extreme ultraviolet (EUV) radiation at a given wavelength while simultaneously providing spectral-selective suppression of the specular reflectance for unwanted longer-wavelength radiation due to the grating phase-shift resonance. The test structures, designed to suppress infrared (IR) radiation, were fabricated by masked deposition of a Si grating substrate followed by coating of the grating with a Mo/Si multilayer. To give the proof of principle, we developed such a hybrid mirror for the specific case of reflecting 13.5 nm radiation while suppressing 10 μm light, resulting in 61% reflectance at the wavelength of 3.5 nm together with the 70 × suppression rate of the specular reflection at the wavelength of 10 μm, but the considered filtering principle can be used for a variety of applications that are based on utilization of broadband radiation sources.
Original languageEnglish
Pages (from-to)16964-16974
Number of pages11
JournalOptics express
Issue number14
Publication statusPublished - 2013


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