Infrared suppression by hybrid EUV multilayer - IR etalon structures

Viacheslav Medvedev, Andrey Yakshin, Robbert Wilhelmus Elisabeth van de Kruijs, V.M. Krivtsun, S.N. Yakunin, K. Koshelev, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)3344-3346
JournalOptics letters
Volume36
Issue number17
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-277892

Cite this

Medvedev, Viacheslav ; Yakshin, Andrey ; van de Kruijs, Robbert Wilhelmus Elisabeth ; Krivtsun, V.M. ; Yakunin, S.N. ; Koshelev, K. ; Bijkerk, Frederik. / Infrared suppression by hybrid EUV multilayer - IR etalon structures. In: Optics letters. 2011 ; Vol. 36, No. 17. pp. 3344-3346.
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title = "Infrared suppression by hybrid EUV multilayer - IR etalon structures",
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author = "Viacheslav Medvedev and Andrey Yakshin and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and V.M. Krivtsun and S.N. Yakunin and K. Koshelev and Frederik Bijkerk",
year = "2011",
doi = "10.1364/OL.36.003344",
language = "English",
volume = "36",
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journal = "Optics letters",
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publisher = "The Optical Society",
number = "17",

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Infrared suppression by hybrid EUV multilayer - IR etalon structures. / Medvedev, Viacheslav; Yakshin, Andrey; van de Kruijs, Robbert Wilhelmus Elisabeth; Krivtsun, V.M.; Yakunin, S.N.; Koshelev, K.; Bijkerk, Frederik.

In: Optics letters, Vol. 36, No. 17, 2011, p. 3344-3346.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Infrared suppression by hybrid EUV multilayer - IR etalon structures

AU - Medvedev, Viacheslav

AU - Yakshin, Andrey

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Krivtsun, V.M.

AU - Yakunin, S.N.

AU - Koshelev, K.

AU - Bijkerk, Frederik

PY - 2011

Y1 - 2011

KW - METIS-277892

U2 - 10.1364/OL.36.003344

DO - 10.1364/OL.36.003344

M3 - Article

VL - 36

SP - 3344

EP - 3346

JO - Optics letters

JF - Optics letters

SN - 0146-9592

IS - 17

ER -