Infrared suppression by hybrid EUV multilayer - IR etalon structures

Viacheslav Medvedev, Andrey Yakshin, Robbert Wilhelmus Elisabeth van de Kruijs, V.M. Krivtsun, S.N. Yakunin, K. Koshelev, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)3344-3346
JournalOptics letters
Volume36
Issue number17
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-277892

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