Initial growth of polycrystalline Si and GeSi alloys in an RTP system

J.B. Rem, Cora Salm, J.H. Klootwijk, Marcel H.H. Weusthof, J. Holleman, J.F. Verweij

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    Original languageUndefined
    Title of host publicationMaterials Research Society Symposium Proceedings Volume 387, Rapid Thermal and Integrated Processing IV
    Place of PublicationSan Francisco, Californie, U.S.A.
    Publication statusPublished - 17 Apr 1995


    • METIS-113832

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