Initial growth of polycrystalline Si and GeSi alloys in an RTP system

J.B. Rem, Cora Salm, J.H. Klootwijk, Marcel H.H. Weusthof, J. Holleman, J.F. Verweij

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Materials Research Society Symposium Proceedings Volume 387, Rapid Thermal and Integrated Processing IV
Place of Publication	San Francisco, Californie, U.S.A.
Pages	323-328
Publication status	Published - 17 Apr 1995

Keywords

@inproceedings{c5d89b2aa95d4c639f23e663eaea9f2b,

title = "Initial growth of polycrystalline Si and GeSi alloys in an RTP system",

keywords = "METIS-113832",

author = "J.B. Rem and Cora Salm and J.H. Klootwijk and Weusthof, {Marcel H.H.} and J. Holleman and J.F. Verweij",

year = "1995",

month = apr,

day = "17",

language = "Undefined",

pages = "323--328",

booktitle = "Materials Research Society Symposium Proceedings Volume 387, Rapid Thermal and Integrated Processing IV",

}

Initial growth of polycrystalline Si and GeSi alloys in an RTP system. / Rem, J.B.; Salm, Cora; Klootwijk, J.H. et al.
Materials Research Society Symposium Proceedings Volume 387, Rapid Thermal and Integrated Processing IV. San Francisco, Californie, U.S.A., 1995. p. 323-328.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Initial growth of polycrystalline Si and GeSi alloys in an RTP system

AU - Rem, J.B.

AU - Salm, Cora

AU - Klootwijk, J.H.

AU - Weusthof, Marcel H.H.

AU - Holleman, J.

AU - Verweij, J.F.

PY - 1995/4/17

Y1 - 1995/4/17

KW - METIS-113832

M3 - Conference contribution

SP - 323

EP - 328

BT - Materials Research Society Symposium Proceedings Volume 387, Rapid Thermal and Integrated Processing IV

CY - San Francisco, Californie, U.S.A.

ER -