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Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
B. Van Hao, Frank B. Wiggers, Anubha Gupta, Duc Minh Nguyen, Antonius A.I. Aarnink, Machiel P. de Jong, Alexeij Y. Kovalgin
Research output: Contribution to journal › Article › Academic › peer-review
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