Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films

B. Van Hao, Frank Bert Wiggers, Anubha Gupta, Duc Minh Nguyen, Antonius A.I. Aarnink, Machiel Pieter de Jong, Alexeij Y. Kovalgin

Research output: Contribution to journalArticleAcademicpeer-review

37 Citations (Scopus)
1 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films'. Together they form a unique fingerprint.