Inkjet-printing- and electroless-plating- based fabrication of RF circuit structures on high-frequency substrates

Ashok Sridhar, J. Reiding, H. Adelaar, F. Achterhoek, D.J. van Dijk, Remko Akkerman

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)

Abstract

In this paper, a method to fabricate radio frequency (RF) circuit structures is described. This method involves inkjet printing of a silver nanoparticle-based ink on a functional substrate material to create the seed track (i.e., the seed layer), onto which copper is subsequently deposited by an electroless plating method, to obtain the desired thickness and conductivity of the RF structures. This process combination was validated by fabricating an S-band filter on a high-frequency substrate and comparing the RF performance of this filter with that of a filter fabricated using the conventional lithography-based method. The adhesion of the circuit structures to the substrate was qualitatively ascertained by the scotch tape test method. The performance of the inkjet-printed–electroless-plated filter was comparable to that of the conventional filter, thus proving the suitability of this novel method for practical RF applications.
Original languageUndefined
Article number085020
Pages (from-to)-
JournalJournal of micromechanics and microengineering
Volume19
Issue number8
DOIs
Publication statusPublished - 2009

Keywords

  • METIS-261274
  • IR-73018

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