Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

This paper reports an inline sensor for the
real-time measurement of the relative permittivity of a
continuously flowing fluid, with electrodes that are
electrically isolated from the fluid. The sensor has been
characterised for relative permittivity values ranging from
1 to 80 – including water and water-containing mixtures –
showing an accuracy within 3% of full scale. The proposed
sensor contains multiple parallel microchannels, each of
which has parallel electrodes in the sidewall, resulting in a
low pressure drop and high sensitivity while the internal
volume is only 50 nL. The fabrication technology is
scalable: equally deep microchannels with widths of 5, 10,
20, and 40 μm are demonstrated. The technology is also
compatible with other inline sensors, enabling further
on-chip integration.
Original languageEnglish
Title of host publication2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationAustin (TX), USA
Pages805-808
Number of pages4
ISBN (Electronic)979-8-3503-5792-9
DOIs
Publication statusPublished - 22 Feb 2024
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: 21 Jan 202425 Jan 2024
Conference number: 37

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Abbreviated titleMEMS 2024
Country/TerritoryUnited States
CityAustin
Period21/01/2425/01/24

Keywords

  • 2024 OA procedure

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