Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes

Maarten J.S. Bonnema; Henk-Willem Veltkamp; Dennis Alveringh; Remco J. Wiegerink; Joost C. Lötters

doi:10.1109/mems58180.2024.10439445

Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes

Maarten J.S. Bonnema, Henk-Willem Veltkamp, Dennis Alveringh, Remco J. Wiegerink, Joost C. Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This paper reports an inline sensor for the
real-time measurement of the relative permittivity of a
continuously flowing fluid, with electrodes that are
electrically isolated from the fluid. The sensor has been
characterised for relative permittivity values ranging from
1 to 80 – including water and water-containing mixtures –
showing an accuracy within 3% of full scale. The proposed
sensor contains multiple parallel microchannels, each of
which has parallel electrodes in the sidewall, resulting in a
low pressure drop and high sensitivity while the internal
volume is only 50 nL. The fabrication technology is
scalable: equally deep microchannels with widths of 5, 10,
20, and 40 μm are demonstrated. The technology is also
compatible with other inline sensors, enabling further
on-chip integration.

Original language	English
Title of host publication	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	Austin (TX), USA
Pages	805-808
Number of pages	4
ISBN (Electronic)	979-8-3503-5792-9
DOIs	https://doi.org/10.1109/mems58180.2024.10439445
Publication status	Published - 22 Feb 2024
Event	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States Duration: 21 Jan 2024 → 25 Jan 2024 Conference number: 37

Conference

Conference	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Abbreviated title	MEMS 2024
Country/Territory	United States
City	Austin
Period	21/01/24 → 25/01/24

Keywords

2024 OA procedure

Access to Document

10.1109/mems58180.2024.10439445

ArticleFinal published version, 1.75 MBLicence: Taverne

Cite this

@inproceedings{f9350270f33d4df4a801d2f69f0f797e,

title = "Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes",

abstract = "This paper reports an inline sensor for thereal-time measurement of the relative permittivity of acontinuously flowing fluid, with electrodes that areelectrically isolated from the fluid. The sensor has beencharacterised for relative permittivity values ranging from1 to 80 – including water and water-containing mixtures –showing an accuracy within 3% of full scale. The proposedsensor contains multiple parallel microchannels, each ofwhich has parallel electrodes in the sidewall, resulting in alow pressure drop and high sensitivity while the internalvolume is only 50 nL. The fabrication technology isscalable: equally deep microchannels with widths of 5, 10,20, and 40 μm are demonstrated. The technology is alsocompatible with other inline sensors, enabling furtheron-chip integration.",

keywords = "2024 OA procedure",

author = "Bonnema, {Maarten J.S.} and Henk-Willem Veltkamp and Dennis Alveringh and Wiegerink, {Remco J.} and L{\"o}tters, {Joost C.}",

year = "2024",

month = feb,

day = "22",

doi = "10.1109/mems58180.2024.10439445",

language = "English",

pages = "805--808",

booktitle = "2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",

}

Bonnema, MJS , Veltkamp, H-W , Alveringh, D , Wiegerink, RJ & Lötters, JC 2024, Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes. in 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). Austin (TX), USA, pp. 805-808, 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024, Austin, Texas, United States, 21/01/24. https://doi.org/10.1109/mems58180.2024.10439445

Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes. / Bonnema, Maarten J.S.; Veltkamp, Henk-Willem ; Alveringh, Dennis et al.
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). Austin (TX), USA, 2024. p. 805-808.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes

AU - Bonnema, Maarten J.S.

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AU - Alveringh, Dennis

AU - Wiegerink, Remco J.

AU - Lötters, Joost C.

N1 - Conference code: 37

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Y1 - 2024/2/22

N2 - This paper reports an inline sensor for thereal-time measurement of the relative permittivity of acontinuously flowing fluid, with electrodes that areelectrically isolated from the fluid. The sensor has beencharacterised for relative permittivity values ranging from1 to 80 – including water and water-containing mixtures –showing an accuracy within 3% of full scale. The proposedsensor contains multiple parallel microchannels, each ofwhich has parallel electrodes in the sidewall, resulting in alow pressure drop and high sensitivity while the internalvolume is only 50 nL. The fabrication technology isscalable: equally deep microchannels with widths of 5, 10,20, and 40 μm are demonstrated. The technology is alsocompatible with other inline sensors, enabling furtheron-chip integration.

AB - This paper reports an inline sensor for thereal-time measurement of the relative permittivity of acontinuously flowing fluid, with electrodes that areelectrically isolated from the fluid. The sensor has beencharacterised for relative permittivity values ranging from1 to 80 – including water and water-containing mixtures –showing an accuracy within 3% of full scale. The proposedsensor contains multiple parallel microchannels, each ofwhich has parallel electrodes in the sidewall, resulting in alow pressure drop and high sensitivity while the internalvolume is only 50 nL. The fabrication technology isscalable: equally deep microchannels with widths of 5, 10,20, and 40 μm are demonstrated. The technology is alsocompatible with other inline sensors, enabling furtheron-chip integration.

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M3 - Conference contribution

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ER -

Inline and Real-Time Microfluidic Relative Permittivity Sensor Using Highly Doped Silicon Sidewall Electrodes

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Conference

Keywords

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