Abstract
This paper reports a sensor for the inline measurement of the thermal conductivity of liquids at flow rates up to 1 g/h. A highly-doped silicon heater is suspended in the microchannel. The sensor is characterised for thermal conductivity values ranging from 0.169 W/mK (isopropanol) up to 0.617 W/mK (water), showing an accuracy within 3% of full scale. The suspended heater is designed to transport heat directly into the fluid, minimising heat losses to the environment. Moreover, cavities on either side of the microchannel increase the thermal isolation which further reduces the power consumption. The thermal conductivity of the fluid is determined by measuring the temperature increase when the heater dissipates 10 mW of power. Furthermore, the fabrication technology allows further on-chip integration with other inline microfluidic sensors.
Original language | English |
---|---|
Title of host publication | 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | IEEE |
Pages | 169-172 |
Number of pages | 4 |
ISBN (Electronic) | 9798331508890 |
DOIs | |
Publication status | Published - 19 Mar 2025 |
Event | 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan Duration: 19 Jan 2025 → 23 Jan 2025 Conference number: 38 |
Conference
Conference | 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 |
---|---|
Abbreviated title | MEMS 2025 |
Country/Territory | Taiwan |
City | Kaohsiung |
Period | 19/01/25 → 23/01/25 |
Keywords
- NLA
- Microfluidic sensor
- Silicon
- Microheater
- Thermal conductivity