Inline Microfluidic Thermal Conductivity Sensor Using A Suspended Silicon Heater

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Abstract

This paper reports a sensor for the inline measurement of the thermal conductivity of liquids at flow rates up to 1 g/h. A highly-doped silicon heater is suspended in the microchannel. The sensor is characterised for thermal conductivity values ranging from 0.169 W/mK (isopropanol) up to 0.617 W/mK (water), showing an accuracy within 3% of full scale. The suspended heater is designed to transport heat directly into the fluid, minimising heat losses to the environment. Moreover, cavities on either side of the microchannel increase the thermal isolation which further reduces the power consumption. The thermal conductivity of the fluid is determined by measuring the temperature increase when the heater dissipates 10 mW of power. Furthermore, the fabrication technology allows further on-chip integration with other inline microfluidic sensors.
Original languageEnglish
Title of host publication2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Pages169-172
Number of pages4
ISBN (Electronic)9798331508890
DOIs
Publication statusPublished - 19 Mar 2025
Event38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan
Duration: 19 Jan 202523 Jan 2025
Conference number: 38

Conference

Conference38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Abbreviated titleMEMS 2025
Country/TerritoryTaiwan
CityKaohsiung
Period19/01/2523/01/25

Keywords

  • NLA
  • Microfluidic sensor
  • Silicon
  • Microheater
  • Thermal conductivity

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