Inline pressure sensing mechanisms enabling scalable range and sensitivity

Dennis Alveringh, Jarno Groenesteijn, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Abstract

We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.
Original languageUndefined
Title of host publication18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015
PublisherThe Printing House, Inc.
Pages1187-1190
Number of pages4
ISBN (Print)978-1-4799-8955-3
DOIs
Publication statusPublished - 21 Jun 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015 - Dena'ina Convention Center, Anchorage, United States
Duration: 21 Jun 201525 Jun 2015
Conference number: 18
http://www.transducers2015.org/

Publication series

Name
PublisherThe Printing House, Inc.

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015
Abbreviated titleTRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period21/06/1525/06/15
Internet address

Keywords

  • TST-FLUID HANDLING
  • EWI-26207
  • Lab on a chip
  • METIS-312692
  • Pressure sensor
  • IR-96804
  • Capacitive readout
  • Surface channel technology

Cite this

Alveringh, D., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2015). Inline pressure sensing mechanisms enabling scalable range and sensitivity. In 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015 (pp. 1187-1190). The Printing House, Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181141
Alveringh, Dennis ; Groenesteijn, Jarno ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Inline pressure sensing mechanisms enabling scalable range and sensitivity. 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., 2015. pp. 1187-1190
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abstract = "We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.",
keywords = "TST-FLUID HANDLING, EWI-26207, Lab on a chip, METIS-312692, Pressure sensor, IR-96804, Capacitive readout, Surface channel technology",
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Alveringh, D, Groenesteijn, J, Wiegerink, RJ & Lötters, JC 2015, Inline pressure sensing mechanisms enabling scalable range and sensitivity. in 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., pp. 1187-1190, 18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015, Anchorage, United States, 21/06/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181141

Inline pressure sensing mechanisms enabling scalable range and sensitivity. / Alveringh, Dennis; Groenesteijn, Jarno; Wiegerink, Remco J.; Lötters, Joost Conrad.

18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., 2015. p. 1187-1190.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Alveringh D, Groenesteijn J, Wiegerink RJ, Lötters JC. Inline pressure sensing mechanisms enabling scalable range and sensitivity. In 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc. 2015. p. 1187-1190 https://doi.org/10.1109/TRANSDUCERS.2015.7181141