Inline pressure sensing mechanisms enabling scalable range and sensitivity

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)

    Abstract

    We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.
    Original languageUndefined
    Title of host publication18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015
    PublisherThe Printing House, Inc.
    Pages1187-1190
    Number of pages4
    ISBN (Print)978-1-4799-8955-3
    DOIs
    Publication statusPublished - 21 Jun 2015
    Event18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015 - Dena'ina Convention Center, Anchorage, United States
    Duration: 21 Jun 201525 Jun 2015
    Conference number: 18
    http://www.transducers2015.org/

    Publication series

    Name
    PublisherThe Printing House, Inc.

    Conference

    Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015
    Abbreviated titleTRANSDUCERS 2015
    CountryUnited States
    CityAnchorage
    Period21/06/1525/06/15
    Internet address

    Keywords

    • TST-FLUID HANDLING
    • EWI-26207
    • Lab on a chip
    • METIS-312692
    • Pressure sensor
    • IR-96804
    • Capacitive readout
    • Surface channel technology

    Cite this

    Alveringh, D., Groenesteijn, J., Wiegerink, R. J., & Lötters, J. C. (2015). Inline pressure sensing mechanisms enabling scalable range and sensitivity. In 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015 (pp. 1187-1190). The Printing House, Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181141