Inline pressure sensing mechanisms enabling scalable range and sensitivity

Dennis Alveringh; Jarno Groenesteijn; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.1109/TRANSDUCERS.2015.7181141

Inline pressure sensing mechanisms enabling scalable range and sensitivity

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

99 Downloads (Pure)

Abstract

We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.

Original language	English
Title of host publication	18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015
Publisher	The Printing House, Inc.
Pages	1187-1190
Number of pages	4
ISBN (Print)	978-1-4799-8955-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181141
Publication status	Published - 21 Jun 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015 - Dena'ina Convention Center, Anchorage, United States Duration: 21 Jun 2015 → 25 Jun 2015 Conference number: 18 http://www.transducers2015.org/

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015
Abbreviated title	TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	21/06/15 → 25/06/15
Internet address	http://www.transducers2015.org/

Keywords

TST-FLUID HANDLING
Lab on a chip
Pressure sensor
Capacitive readout
Surface channel technology
22/3 OA procedure

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10.1109/TRANSDUCERS.2015.7181141

ArticleFinal published version, 1.01 MBLicence: Taverne

Cite this

@inproceedings{b56fcfe316354e3a912efbdd36613354,

title = "Inline pressure sensing mechanisms enabling scalable range and sensitivity",

abstract = "We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.",

keywords = "TST-FLUID HANDLING, Lab on a chip, Pressure sensor, Capacitive readout, Surface channel technology, 22/3 OA procedure",

author = "Dennis Alveringh and Jarno Groenesteijn and Wiegerink, \{Remco J.\} and L{\"o}tters, \{Joost Conrad\}",

year = "2015",

month = jun,

day = "21",

doi = "10.1109/TRANSDUCERS.2015.7181141",

language = "English",

isbn = "978-1-4799-8955-3",

pages = "1187--1190",

booktitle = "18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015",

publisher = "The Printing House, Inc.",

note = "18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",

url = "http://www.transducers2015.org/",

}

Alveringh, D , Groenesteijn, J , Wiegerink, RJ & Lötters, JC 2015, Inline pressure sensing mechanisms enabling scalable range and sensitivity. in 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., pp. 1187-1190, 18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015, Anchorage, Alaska, United States, 21/06/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181141

Inline pressure sensing mechanisms enabling scalable range and sensitivity. / Alveringh, Dennis ; Groenesteijn, Jarno ; Wiegerink, Remco J. et al.
18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015. The Printing House, Inc., 2015. p. 1187-1190.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Inline pressure sensing mechanisms enabling scalable range and sensitivity

AU - Alveringh, Dennis

AU - Groenesteijn, Jarno

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AU - Lötters, Joost Conrad

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PY - 2015/6/21

Y1 - 2015/6/21

N2 - We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.

AB - We report on two novel capacitive pressure sensing mechanisms that allow measurements inline with other fluidic devices on one chip, without introducing a large internal volume to the fluid path. The first sensing mechanism is based on out-of-plane bending of a U-shaped channel and the same structure could be used for thermal flow sensing simultaneously. The second mechanism is based on deformation of the cross-section of the tube and allows for differential capacitive readout. The sensitivity and range of both mechanisms are scalable. The current implementations are tested up to 2.45 bar and 1 bar respectively.

KW - TST-FLUID HANDLING

KW - Lab on a chip

KW - Pressure sensor

KW - Capacitive readout

KW - Surface channel technology

KW - 22/3 OA procedure

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M3 - Conference contribution

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BT - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015

PB - The Printing House, Inc.

T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems 2015

Y2 - 21 June 2015 through 25 June 2015

ER -

Inline pressure sensing mechanisms enabling scalable range and sensitivity

Abstract

Conference

Keywords

Access to Document

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Cite this