Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Dennis Alveringh; Remco J. Wiegerink; Joost C. Lotters

doi:10.1109/MEMSYS.2018.8346686

Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Dennis Alveringh^*, Remco J. Wiegerink, Joost C. Lotters

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

21 Downloads (Pure)

Abstract

Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R² = 99.83 %) with the model.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Subtitle of host publication	the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	840-843
Number of pages	4
ISBN (Electronic)	978-1-5386-4782-0
ISBN (Print)	978-1-5386-4783-7
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346686
Publication status	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 Conference number: 31 http://www.mems2018.org/

Publication series

Name	International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Abbreviated title	MEMS
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18
Internet address	http://www.mems2018.org/

Keywords

22/3 OA procedure

Access to Document

10.1109/MEMSYS.2018.8346686

ArticleFinal published version, 1.65 MBLicence: Taverne

Cite this

Alveringh, D., Wiegerink, R. J., & Lotters, J. C. (2018). Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018 (pp. 840-843). (International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). IEEE. https://doi.org/10.1109/MEMSYS.2018.8346686

Alveringh, Dennis ; Wiegerink, Remco J. ; Lotters, Joost C. / Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018. Piscataway, NJ : IEEE, 2018. pp. 840-843 (International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{8c3a8ca74e9049dfbcb8a70c4a7eef05,

title = "Inline relative permittivity sensing using silicon electrodes realized in surface channel technology",

abstract = "Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.",

keywords = "22/3 OA procedure",

author = "Dennis Alveringh and Wiegerink, {Remco J.} and Lotters, {Joost C.}",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346686",

language = "English",

isbn = "978-1-5386-4783-7",

series = "International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

pages = "840--843",

booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

note = "31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, MEMS ; Conference date: 21-01-2018 Through 25-01-2018",

url = "http://www.mems2018.org/",

}

Alveringh, D , Wiegerink, RJ & Lotters, JC 2018, Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018. International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, IEEE, Piscataway, NJ, pp. 840-843, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346686

Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. / Alveringh, Dennis ; Wiegerink, Remco J.; Lotters, Joost C.

2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018. Piscataway, NJ : IEEE, 2018. p. 840-843 (International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

AU - Alveringh, Dennis

AU - Wiegerink, Remco J.

AU - Lotters, Joost C.

N1 - Conference code: 31

PY - 2018/4/24

Y1 - 2018/4/24

N2 - Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.

AB - Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.

KW - 22/3 OA procedure

UR - http://www.scopus.com/inward/record.url?scp=85046997309&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2018.8346686

DO - 10.1109/MEMSYS.2018.8346686

M3 - Conference contribution

AN - SCOPUS:85046997309

SN - 978-1-5386-4783-7

T3 - International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 840

EP - 843

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - IEEE

CY - Piscataway, NJ

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Alveringh D , Wiegerink RJ , Lotters JC. Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018. Piscataway, NJ: IEEE. 2018. p. 840-843. (International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346686

Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this