Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Dennis Alveringh*, Remco J. Wiegerink, Joost C. Lotters

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)

    Abstract

    Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.

    Original languageEnglish
    Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
    Subtitle of host publicationthe 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages840-843
    Number of pages4
    ISBN (Electronic)978-1-5386-4782-0
    ISBN (Print)978-1-5386-4783-7
    DOIs
    Publication statusPublished - 24 Apr 2018
    Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom
    Duration: 21 Jan 201825 Jan 2018
    Conference number: 31
    http://www.mems2018.org/

    Publication series

    NameInternational Conference on Micro Electro Mechanical Systems (MEMS)
    PublisherIEEE
    Volume2018-January
    ISSN (Print)1084-6999

    Conference

    Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
    Abbreviated titleMEMS
    CountryUnited Kingdom
    CityBelfast
    Period21/01/1825/01/18
    Internet address

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