Inline relative permittivity sensing using silicon electrodes realized in surface channel technology

Dennis Alveringh*, Remco J. Wiegerink, Joost C. Lotters

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

Abstract

Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Subtitle of host publicationthe 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages840-843
Number of pages4
ISBN (Electronic)978-1-5386-4782-0
ISBN (Print)978-1-5386-4783-7
DOIs
Publication statusPublished - 24 Apr 2018
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast Waterfront, Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018
Conference number: 31
http://www.mems2018.org/

Publication series

NameInternational Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Volume2018-January
ISSN (Print)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Abbreviated titleMEMS
CountryUnited Kingdom
CityBelfast
Period21/01/1825/01/18
Internet address

Fingerprint Dive into the research topics of 'Inline relative permittivity sensing using silicon electrodes realized in surface channel technology'. Together they form a unique fingerprint.

  • Cite this

    Alveringh, D., Wiegerink, R. J., & Lotters, J. C. (2018). Inline relative permittivity sensing using silicon electrodes realized in surface channel technology. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018: the 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, Northern Ireland, 21-25 January 2018 (pp. 840-843). (International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Piscataway, NJ: IEEE. https://doi.org/10.1109/MEMSYS.2018.8346686