Innovative process development for a new micro-tribosensor using surface micromachining

S. Deladi
, M.J. de Boer
, G.J.M. Krijnen
, D. Rosén
, M.C. Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

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2002

Innovative process development for a new microtribosensor using surface micromachining
Deladi, S., de Boer, M. J., Rosén, D., Krijnen, G. J. M. & Elwenspoek, M. C., 6 Oct 2002, MME 2002: 13th Micromechanics Europe Workshop : 6th-8th october, 2002, Sinaia, Romania. Bucharest: IMNR, p. 63-66 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review