Innovative process development for a new microtribosensor using surface micromachining

S. Deladi, M.J. de Boer, D. Rosén, G.J.M. Krijnen, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMME 2002
    Subtitle of host publication13th Micromechanics Europe Workshop : 6th-8th october, 2002, Sinaia, Romania
    Place of PublicationBucharest
    PublisherIMNR
    Pages63-66
    Number of pages4
    ISBN (Print)973-0-02472-3
    Publication statusPublished - 6 Oct 2002
    Event13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania
    Duration: 6 Oct 20028 Oct 2002

    Workshop

    Workshop13th Micromechanics Europe Workshop, MME 2002
    Abbreviated titleMME
    CountryRomania
    CitySinaia
    Period6/10/028/10/02

    Cite this

    Deladi, S., de Boer, M. J., Rosén, D., Krijnen, G. J. M., & Elwenspoek, M. C. (2002). Innovative process development for a new microtribosensor using surface micromachining. In MME 2002: 13th Micromechanics Europe Workshop : 6th-8th october, 2002, Sinaia, Romania (pp. 63-66). Bucharest: IMNR.