Innovative process development for a new microtribosensor using surface micromachining

S. Deladi; M.J. de Boer; D. Rosén; G.J.M. Krijnen; M.C. Elwenspoek

Innovative process development for a new microtribosensor using surface micromachining

S. Deladi
, M.J. de Boer
, D. Rosén
, G.J.M. Krijnen
, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	MME 2002
Subtitle of host publication	13th Micromechanics Europe Workshop : 6th-8th october, 2002, Sinaia, Romania
Place of Publication	Bucharest
Publisher	IMNR
Pages	63-66
Number of pages	4
ISBN (Print)	973-0-02472-3
Publication status	Published - 6 Oct 2002
Event	13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania Duration: 6 Oct 2002 → 8 Oct 2002

Workshop

Workshop	13th Micromechanics Europe Workshop, MME 2002
Abbreviated title	MME
Country/Territory	Romania
City	Sinaia
Period	6/10/02 → 8/10/02

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Innovative process development for a new micro-tribosensor using surface micromachining
Deladi, S., de Boer, M. J., Krijnen, G. J. M., Rosén, D. & Elwenspoek, M. C., 13 Jun 2003, In: Journal of micromechanics and microengineering. 13, 13, p. S17-S22 6 p.
Research output: Contribution to journal › Article › Academic › peer-review
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Cite this

@inproceedings{1253bb7362344d1997c3de354b74b981,

title = "Innovative process development for a new microtribosensor using surface micromachining",

author = "S. Deladi and \{de Boer\}, M.J. and D. Ros{\'e}n and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2002",

month = oct,

day = "6",

language = "English",

isbn = "973-0-02472-3",

pages = "63--66",

booktitle = "MME 2002",

publisher = "IMNR",

note = "13th Micromechanics Europe Workshop, MME 2002, MME ; Conference date: 06-10-2002 Through 08-10-2002",

}

Innovative process development for a new microtribosensor using surface micromachining. / Deladi, S.; de Boer, M.J.; Rosén, D. et al.
MME 2002: 13th Micromechanics Europe Workshop : 6th-8th october, 2002, Sinaia, Romania. Bucharest: IMNR, 2002. p. 63-66.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Innovative process development for a new microtribosensor using surface micromachining

AU - Deladi, S.

AU - de Boer, M.J.

AU - Rosén, D.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

PY - 2002/10/6

Y1 - 2002/10/6

M3 - Conference contribution

SN - 973-0-02472-3

SP - 63

EP - 66

BT - MME 2002

PB - IMNR

CY - Bucharest

T2 - 13th Micromechanics Europe Workshop, MME 2002

Y2 - 6 October 2002 through 8 October 2002

ER -

Innovative process development for a new microtribosensor using surface micromachining

Workshop

UN SDGs

Research output

Innovative process development for a new micro-tribosensor using surface micromachining

Cite this