Insight in clogging of MEMS based micro cryogenic coolers

P.P.M. Lerou, Hermanus J.M. ter Brake, Herman J. Holland, Johannes Faas Burger, Horst Rogalla

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)6-
    JournalApplied physics letters
    Volume90
    Publication statusPublished - 2007

    Keywords

    • METIS-243490

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