Insitu stress measurement of thin film and multilayer growth

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 19 Jan 2016
EventPhysics@FOM Veldhoven 2016 - NH Koningshof Veldhoven, Veldhoven, The Netherlands, Netherlands
Duration: 20 Jan 201620 Jan 2016

Conference

ConferencePhysics@FOM Veldhoven 2016
Abbreviated titleFOM
CountryNetherlands
CityVeldhoven, The Netherlands
Period20/01/1620/01/16

Keywords

  • METIS-315449

Cite this

Reinink, J., van de Kruijs, R. W. E., & Bijkerk, F. (2016). Insitu stress measurement of thin film and multilayer growth. -. Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.
Reinink, Johan ; van de Kruijs, Robbert Wilhelmus Elisabeth ; Bijkerk, Frederik. / Insitu stress measurement of thin film and multilayer growth. Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.
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title = "Insitu stress measurement of thin film and multilayer growth",
keywords = "METIS-315449",
author = "Johan Reinink and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk",
year = "2016",
month = "1",
day = "19",
language = "English",
pages = "--",
note = "Physics@FOM Veldhoven 2016, FOM ; Conference date: 20-01-2016 Through 20-01-2016",

}

Reinink, J, van de Kruijs, RWE & Bijkerk, F 2016, 'Insitu stress measurement of thin film and multilayer growth' Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands, 20/01/16 - 20/01/16, pp. -.

Insitu stress measurement of thin film and multilayer growth. / Reinink, Johan; van de Kruijs, Robbert Wilhelmus Elisabeth; Bijkerk, Frederik.

2016. - Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Insitu stress measurement of thin film and multilayer growth

AU - Reinink, Johan

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Bijkerk, Frederik

PY - 2016/1/19

Y1 - 2016/1/19

KW - METIS-315449

M3 - Poster

SP - -

ER -

Reinink J, van de Kruijs RWE, Bijkerk F. Insitu stress measurement of thin film and multilayer growth. 2016. Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.