Insitu stress measurement of thin film and multilayer growth

Research output: Contribution to conferencePoster

Original languageEnglish
Pages-
Publication statusPublished - 19 Jan 2016
EventPhysics@FOM Veldhoven 2016 - NH Koningshof Veldhoven, Veldhoven, The Netherlands, Netherlands
Duration: 20 Jan 201620 Jan 2016

Conference

ConferencePhysics@FOM Veldhoven 2016
Abbreviated titleFOM
CountryNetherlands
CityVeldhoven, The Netherlands
Period20/01/1620/01/16

Keywords

  • METIS-315449

Cite this

Reinink, J., van de Kruijs, R. W. E., & Bijkerk, F. (2016). Insitu stress measurement of thin film and multilayer growth. -. Poster session presented at Physics@FOM Veldhoven 2016, Veldhoven, The Netherlands, Netherlands.