Integrated 3D sound intensity sensor with four-wire particle velocity sensors

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    Abstract

    A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.
    Original languageUndefined
    Title of host publicationProceedings of DTIP 2008
    Place of PublicationNice
    PublisherEDA Publishing Association
    Pages3
    Number of pages3
    ISBN (Print)978-2-35500-006-5
    DOIs
    Publication statusPublished - May 2008
    Event2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008 - Nice, France
    Duration: 9 Apr 200811 Apr 2008

    Publication series

    Name
    PublisherEDA Publishing Association
    Volumeabs/0805-0

    Conference

    Conference2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008
    Abbreviated titleDTIP
    CountryFrance
    CityNice
    Period9/04/0811/04/08

    Keywords

    • TST-SENSORS
    • METIS-255419
    • EWI-14646
    • IR-65232

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