Integrated automatic modular measuring system

I.D. Baikie; Kees van der Werf; L.J. Hanekamp

doi:10.1063/1.1140028

Integrated automatic modular measuring system

I.D. Baikie, Kees van der Werf, L.J. Hanekamp

Research output: Contribution to journal › Article › Academic

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Abstract

This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand‐alone and remote modes and are interconnected using an IEEE‐488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.

Original language	Undefined
Pages (from-to)	2075
Journal	Review of scientific instruments
Volume	59
Issue number	9
DOIs	https://doi.org/10.1063/1.1140028
Publication status	Published - 1988

Keywords

IR-73185

Access to Document

10.1063/1.1140028

integrated

Cite this

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title = "Integrated automatic modular measuring system",

abstract = "This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand‐alone and remote modes and are interconnected using an IEEE‐488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.",

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author = "I.D. Baikie and {van der Werf}, Kees and L.J. Hanekamp",

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doi = "10.1063/1.1140028",

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AB - This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand‐alone and remote modes and are interconnected using an IEEE‐488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.

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U2 - 10.1063/1.1140028

DO - 10.1063/1.1140028

M3 - Article

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