Integrated automatic modular measuring system

I.D. Baikie, Kees van der Werf, L.J. Hanekamp

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    Abstract

    This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand‐alone and remote modes and are interconnected using an IEEE‐488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.
    Original languageUndefined
    Pages (from-to)2075
    JournalReview of scientific instruments
    Volume59
    Issue number9
    DOIs
    Publication statusPublished - 1988

    Keywords

    • IR-73185

    Cite this

    Baikie, I. D., van der Werf, K., & Hanekamp, L. J. (1988). Integrated automatic modular measuring system. Review of scientific instruments, 59(9), 2075. https://doi.org/10.1063/1.1140028