Integrated automatic modular measuring system

I.D. Baikie, Kees van der Werf, L.J. Hanekamp

    Research output: Contribution to journalArticleAcademic

    7 Citations (Scopus)
    126 Downloads (Pure)


    This paper describes a versatile automatic measuring system composed of discrete modules. The modules can operate in both stand‐alone and remote modes and are interconnected using an IEEE‐488 bus, allowing utilization of standard measurement apparatus and peripherals. The system design allows user optimization of the measurement procedure, which can thus be tailored to meet specific experimental requirements. The flexibility of this system is demonstrated by its application in spectroscopic ellipsometry.
    Original languageUndefined
    Pages (from-to)2075
    JournalReview of scientific instruments
    Issue number9
    Publication statusPublished - 1988


    • IR-73185

    Cite this