Integrated blood-gas sensor for pO2, pCO2 and pH

Ph. Arquint; A. van den Berg; B.H. van der Schoot; N.F. de Rooij; H. Bühler; W.E. Morf; L.F.J. Dürselen

doi:10.1016/0925-4005(93)85396-R

Integrated blood-gas sensor for pO₂, pCO₂ and pH

Ph. Arquint, A. van den Berg, B.H. van der Schoot, N.F. de Rooij, H. Bühler, W.E. Morf, L.F.J. Dürselen

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Abstract

The fabrication and characterization of a combined pO₂, pCO₂ and pH chemical sensor, designed for blood-gas monitoring, are discussed. Classical electrochemical principles are used in a miniaturized planar-type structure. Both amperometric (pO₂) and potentiometric devices (pCO₂ pH) are integrated on a 10 mm × 10 mm chip. The transducer part of the chip is realized using standard silicon technology. Polyacrylamide and polysiloxane layers, which are used as hydrogel and gas-permeable membrane, respectively, are deposited and patterned by photopolymerization. Thus the whole sensor is fabricated on wafer level using IC-compatible processes. The characterization has been performed in aqueous solutions and in blood used for transfusion. For this purpose, the chip is mounted into a flow-through cell. The sensors have a typical sensitivity of 5 nA/mmHg (pO₂), 50 mV/decade (pCO₂) and 55 mV/pH (pH).

Original language	English
Pages (from-to)	340-344
Number of pages	5
Journal	Sensors and Actuators: B. Chemical
Volume	13
Issue number	1-3
DOIs	https://doi.org/10.1016/0925-4005(93)85396-R
Publication status	Published - 1 Jan 1993
Externally published	Yes

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title = "Integrated blood-gas sensor for pO2, pCO2 and pH",

abstract = "The fabrication and characterization of a combined pO2, pCO2 and pH chemical sensor, designed for blood-gas monitoring, are discussed. Classical electrochemical principles are used in a miniaturized planar-type structure. Both amperometric (pO2) and potentiometric devices (pCO2 pH) are integrated on a 10 mm × 10 mm chip. The transducer part of the chip is realized using standard silicon technology. Polyacrylamide and polysiloxane layers, which are used as hydrogel and gas-permeable membrane, respectively, are deposited and patterned by photopolymerization. Thus the whole sensor is fabricated on wafer level using IC-compatible processes. The characterization has been performed in aqueous solutions and in blood used for transfusion. For this purpose, the chip is mounted into a flow-through cell. The sensors have a typical sensitivity of 5 nA/mmHg (pO2), 50 mV/decade (pCO2) and 55 mV/pH (pH).",

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AU - Arquint, Ph.

AU - van den Berg, A.

AU - van der Schoot, B.H.

AU - de Rooij, N.F.

AU - Bühler, H.

AU - Morf, W.E.

AU - Dürselen, L.F.J.

PY - 1993/1/1

Y1 - 1993/1/1

N2 - The fabrication and characterization of a combined pO2, pCO2 and pH chemical sensor, designed for blood-gas monitoring, are discussed. Classical electrochemical principles are used in a miniaturized planar-type structure. Both amperometric (pO2) and potentiometric devices (pCO2 pH) are integrated on a 10 mm × 10 mm chip. The transducer part of the chip is realized using standard silicon technology. Polyacrylamide and polysiloxane layers, which are used as hydrogel and gas-permeable membrane, respectively, are deposited and patterned by photopolymerization. Thus the whole sensor is fabricated on wafer level using IC-compatible processes. The characterization has been performed in aqueous solutions and in blood used for transfusion. For this purpose, the chip is mounted into a flow-through cell. The sensors have a typical sensitivity of 5 nA/mmHg (pO2), 50 mV/decade (pCO2) and 55 mV/pH (pH).

AB - The fabrication and characterization of a combined pO2, pCO2 and pH chemical sensor, designed for blood-gas monitoring, are discussed. Classical electrochemical principles are used in a miniaturized planar-type structure. Both amperometric (pO2) and potentiometric devices (pCO2 pH) are integrated on a 10 mm × 10 mm chip. The transducer part of the chip is realized using standard silicon technology. Polyacrylamide and polysiloxane layers, which are used as hydrogel and gas-permeable membrane, respectively, are deposited and patterned by photopolymerization. Thus the whole sensor is fabricated on wafer level using IC-compatible processes. The characterization has been performed in aqueous solutions and in blood used for transfusion. For this purpose, the chip is mounted into a flow-through cell. The sensors have a typical sensitivity of 5 nA/mmHg (pO2), 50 mV/decade (pCO2) and 55 mV/pH (pH).

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JO - Sensors and actuators. B: Chemical

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SN - 0925-4005

IS - 1-3

ER -

Integrated blood-gas sensor for pO2, pCO2 and pH

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Integrated blood-gas sensor for pO₂, pCO₂ and pH