Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide.

P.V.S. Pham Van So, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Markus Pollnau, Gijsbertus J.M. Krijnen, Hugo Hoekstra

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    7 Citations (Scopus)


    We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.
    Original languageUndefined
    Pages (from-to)3003-3005
    Number of pages3
    JournalOptics letters
    Issue number15
    Publication statusPublished - Aug 2011


    • Integrated Optics devices
    • IR-77963
    • Optical microelectromechanical devices
    • EWI-20440
    • METIS-278764
    • Sensors

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