Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide.

P.V.S. Pham Van So, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Markus Pollnau, Gijsbertus J.M. Krijnen, Hugo Hoekstra

    Research output: Contribution to journalArticleAcademicpeer-review

    6 Citations (Scopus)

    Abstract

    We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.
    Original languageUndefined
    Pages (from-to)3003-3005
    Number of pages3
    JournalOptics letters
    Volume36
    Issue number15
    Publication statusPublished - Aug 2011

    Keywords

    • IOMS-SNS: SENSORS
    • TST-ACTUATORS
    • Integrated Optics devices
    • IR-77963
    • Optical microelectromechanical devices
    • EWI-20440
    • METIS-278764
    • Sensors

    Cite this

    @article{b232186706fb440c8d2d745e2378934a,
    title = "Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide.",
    abstract = "We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1{\%} H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.",
    keywords = "IOMS-SNS: SENSORS, TST-ACTUATORS, Integrated Optics devices, IR-77963, Optical microelectromechanical devices, EWI-20440, METIS-278764, Sensors",
    author = "{Pham Van So}, P.V.S. and Mindert Dijkstra and {van Wolferen}, {Hendricus A.G.M.} and Markus Pollnau and Krijnen, {Gijsbertus J.M.} and Hugo Hoekstra",
    year = "2011",
    month = "8",
    language = "Undefined",
    volume = "36",
    pages = "3003--3005",
    journal = "Optics letters",
    issn = "0146-9592",
    publisher = "The Optical Society",
    number = "15",

    }

    Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide. / Pham Van So, P.V.S.; Dijkstra, Mindert; van Wolferen, Hendricus A.G.M.; Pollnau, Markus; Krijnen, Gijsbertus J.M.; Hoekstra, Hugo.

    In: Optics letters, Vol. 36, No. 15, 08.2011, p. 3003-3005.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide.

    AU - Pham Van So, P.V.S.

    AU - Dijkstra, Mindert

    AU - van Wolferen, Hendricus A.G.M.

    AU - Pollnau, Markus

    AU - Krijnen, Gijsbertus J.M.

    AU - Hoekstra, Hugo

    PY - 2011/8

    Y1 - 2011/8

    N2 - We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.

    AB - We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.

    KW - IOMS-SNS: SENSORS

    KW - TST-ACTUATORS

    KW - Integrated Optics devices

    KW - IR-77963

    KW - Optical microelectromechanical devices

    KW - EWI-20440

    KW - METIS-278764

    KW - Sensors

    M3 - Article

    VL - 36

    SP - 3003

    EP - 3005

    JO - Optics letters

    JF - Optics letters

    SN - 0146-9592

    IS - 15

    ER -