Abstract
We demonstrate a proof of concept of a novel and compact integrated mechano-optical sensor for H2 detection based on a microcantilever suspended above a Si3N4 grated waveguide. The fabricated devices are mechanically and optically modeled and characterized. Sensing operation of the sensor is demonstrated with 1% H2 in N2. The error in detection of the cantilever bending induced by absorption of H2 is estimated to be approximately 10 nm. Significantly improved sensitivity (down to ∼33 pm) is expected for reduced initial bending of the microcantilever. The simulation and experimental results are in good agreement and provide a good guideline for further optimization of the sensor.
Original language | English |
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Pages (from-to) | 3003-3005 |
Number of pages | 3 |
Journal | Optics letters |
Volume | 36 |
Issue number | 15 |
Publication status | Published - Aug 2011 |
Keywords
- IOMS-SNS: SENSORS
- TST-ACTUATORS
- Integrated Optics devices
- IR-77963
- Optical microelectromechanical devices
- EWI-20440
- METIS-278764
- Sensors