Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide.

P.V.S. Pham Van So, Mindert Dijkstra, Hendricus A.G.M. van Wolferen, Markus Pollnau, Gijsbertus J.M. Krijnen, Hugo Hoekstra

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    Physics & Astronomy