| Original language | English |
|---|---|
| Publisher | University of Twente |
| Place of Publication | Enschede |
| Publication status | Published - 23 Jun 1998 |
Integrated mechano-optical intensity modulator
T. Nauta, G.J. Veldhuis, C. Gui, J.W. Berenschot, P.V. Lambeck
Research output: Other contribution › Other research output