Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper)

Han J.G.E. Gardeniers; Albert  van den Berg

doi:10.1115/FEDSM2002-31155

Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper)

Han J.G.E. Gardeniers, Albert van den Berg

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

Abstract

Although silicon may generally not be the material of first choice for applications in the field of fluidics for (bio)chemistry and medicine, the extended toolbox of fabrication methods makes it a very attractive material for the demonstration of microfluidic principles for these fields. In particular, the monocrystalline nature of silicon substrates in combination with anisotropic etching processes, the precise dry-etching techniques and sophisticated thin-film surface micromachining processes, can be used to create a large variety of innovative microstructures. Several examples of such micro- and nanofluidic structures for (bio)chemical and medical analysis will be presented and discussed.

Original language	English
Title of host publication	ASME 2002 Joint U.S.-European Fluids Engineering Division Conference
Subtitle of host publication	Montreal, Quebec, Canada, July 14–18, 2002
Publisher	American Society of Mechanical Engineers
Pages	1199-1204
ISBN (Electronic)	0-7918-3600-2
ISBN (Print)	0-7918-3615-0
DOIs	https://doi.org/10.1115/FEDSM2002-31155
Publication status	Published - 2002
Event	ASME 2002 Joint U.S.-European Fluids Engineering Division Conference 2002 - Montreal, Canada Duration: 14 Jul 2002 → 18 Jul 2002

Conference

Conference	ASME 2002 Joint U.S.-European Fluids Engineering Division Conference 2002
Country/Territory	Canada
City	Montreal
Period	14/07/02 → 18/07/02

Keywords

Nanofluidics
Silicon

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1115/FEDSM2002-31155

Cite this

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title = "Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper)",

abstract = "Although silicon may generally not be the material of first choice for applications in the field of fluidics for (bio)chemistry and medicine, the extended toolbox of fabrication methods makes it a very attractive material for the demonstration of microfluidic principles for these fields. In particular, the monocrystalline nature of silicon substrates in combination with anisotropic etching processes, the precise dry-etching techniques and sophisticated thin-film surface micromachining processes, can be used to create a large variety of innovative microstructures. Several examples of such micro- and nanofluidic structures for (bio)chemical and medical analysis will be presented and discussed.",

keywords = "Nanofluidics, Silicon",

author = "Gardeniers, {Han J.G.E.} and {van den Berg}, Albert",

year = "2002",

doi = "10.1115/FEDSM2002-31155",

language = "English",

isbn = "0-7918-3615-0",

pages = "1199--1204",

booktitle = "ASME 2002 Joint U.S.-European Fluids Engineering Division Conference",

publisher = "American Society of Mechanical Engineers",

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note = "ASME 2002 Joint U.S.-European Fluids Engineering Division Conference 2002 ; Conference date: 14-07-2002 Through 18-07-2002",

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Gardeniers, HJGE & van den Berg, A 2002, Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper). in ASME 2002 Joint U.S.-European Fluids Engineering Division Conference: Montreal, Quebec, Canada, July 14–18, 2002. American Society of Mechanical Engineers, pp. 1199-1204, ASME 2002 Joint U.S.-European Fluids Engineering Division Conference 2002, Montreal, Quebec, Canada, 14/07/02. https://doi.org/10.1115/FEDSM2002-31155

Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper). / Gardeniers, Han J.G.E.; van den Berg, Albert .
ASME 2002 Joint U.S.-European Fluids Engineering Division Conference: Montreal, Quebec, Canada, July 14–18, 2002. American Society of Mechanical Engineers, 2002. p. 1199-1204.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Integrated Micro- and Nanofluidics: Silicon Revisited

T2 - ASME 2002 Joint U.S.-European Fluids Engineering Division Conference 2002

AU - Gardeniers, Han J.G.E.

AU - van den Berg, Albert

PY - 2002

Y1 - 2002

N2 - Although silicon may generally not be the material of first choice for applications in the field of fluidics for (bio)chemistry and medicine, the extended toolbox of fabrication methods makes it a very attractive material for the demonstration of microfluidic principles for these fields. In particular, the monocrystalline nature of silicon substrates in combination with anisotropic etching processes, the precise dry-etching techniques and sophisticated thin-film surface micromachining processes, can be used to create a large variety of innovative microstructures. Several examples of such micro- and nanofluidic structures for (bio)chemical and medical analysis will be presented and discussed.

AB - Although silicon may generally not be the material of first choice for applications in the field of fluidics for (bio)chemistry and medicine, the extended toolbox of fabrication methods makes it a very attractive material for the demonstration of microfluidic principles for these fields. In particular, the monocrystalline nature of silicon substrates in combination with anisotropic etching processes, the precise dry-etching techniques and sophisticated thin-film surface micromachining processes, can be used to create a large variety of innovative microstructures. Several examples of such micro- and nanofluidic structures for (bio)chemical and medical analysis will be presented and discussed.

KW - Nanofluidics

KW - Silicon

U2 - 10.1115/FEDSM2002-31155

DO - 10.1115/FEDSM2002-31155

M3 - Conference contribution

SN - 0-7918-3615-0

SP - 1199

EP - 1204

BT - ASME 2002 Joint U.S.-European Fluids Engineering Division Conference

PB - American Society of Mechanical Engineers

Y2 - 14 July 2002 through 18 July 2002

ER -

Integrated Micro- and Nanofluidics: Silicon Revisited: (Keynote Paper)

Abstract

Conference

Keywords

UN SDGs

Access to Document

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Cite this