Integrated micromachining process for the fabrication of AIN piezoelectric microstructures

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proc. of SAFE 2004
Place of Publication	Veldhoven
Pages	-
Number of pages	4
Publication status	Published - 25 Nov 2004
Event	Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004 - Veldhoven, Netherlands Duration: 25 Nov 2004 → 26 Nov 2004

Workshop	Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Veldhoven
Period	25/11/04 → 26/11/04

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{eb0c6160bef44e5ba74a631ec9657233,

title = "Integrated micromachining process for the fabrication of AIN piezoelectric microstructures",

keywords = "METIS-219996",

author = "S. Saravanan and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2004",

month = nov,

day = "25",

language = "Undefined",

pages = "--",

booktitle = "Proc. of SAFE 2004",

note = "Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004 ; Conference date: 25-11-2004 Through 26-11-2004",

}

TY - GEN

T1 - Integrated micromachining process for the fabrication of AIN piezoelectric microstructures

AU - Saravanan, S.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2004/11/25

Y1 - 2004/11/25

KW - METIS-219996

M3 - Conference contribution

SP - -

BT - Proc. of SAFE 2004

CY - Veldhoven

T2 - Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004

Y2 - 25 November 2004 through 26 November 2004

ER -