Integrated micromachining process for the fabrication of AIN piezoelectric microstructures

S. Saravanan, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProc. of SAFE 2004
    Place of PublicationVeldhoven
    Pages-
    Number of pages4
    Publication statusPublished - 25 Nov 2004
    EventAnnual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004 - Veldhoven, Netherlands
    Duration: 25 Nov 200426 Nov 2004

    Workshop

    WorkshopAnnual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period25/11/0426/11/04

    Keywords

    • METIS-219996

    Cite this

    Saravanan, S., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2004). Integrated micromachining process for the fabrication of AIN piezoelectric microstructures. In Proc. of SAFE 2004 (pp. -). Veldhoven.