Integrated multi-parameter flow measurement system

Joost Conrad Lötters; E.J. van der Wouden; Jarno Groenesteijn; Wouter Sparreboom; Theodorus S.J. Lammerink; Remco J. Wiegerink

Integrated multi-parameter flow measurement system

Joost Conrad Lötters, E.J. van der Wouden, Jarno Groenesteijn, Wouter Sparreboom, Theodorus S.J. Lammerink, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

14 Citations (Scopus)

44 Downloads (Pure)

Abstract

We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.

Original language	Undefined
Title of host publication	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Place of Publication	USA
Publisher	IEEE
Pages	975-978
Number of pages	4
ISBN (Print)	978-1-4799-3509-3
Publication status	Published - 26 Jan 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States Duration: 26 Jan 2014 → 30 Jan 2014 Conference number: 27

Publication series

Name
Publisher	IEEE Robotics and Automation Society

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated title	MEMS
Country/Territory	United States
City	San Francisco
Period	26/01/14 → 30/01/14

Keywords

EWI-24607
METIS-304039
IR-89881

Access to Document

Multiparameter_Flow_Measurement_System_MEMS2014

Cite this

@inproceedings{1f69da33cb634f088740df056f1efa1b,

title = "Integrated multi-parameter flow measurement system",

abstract = "We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.",

keywords = "EWI-24607, METIS-304039, IR-89881",

author = "L{\"o}tters, {Joost Conrad} and {van der Wouden}, E.J. and Jarno Groenesteijn and Wouter Sparreboom and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.}",

year = "2014",

month = jan,

day = "26",

language = "Undefined",

isbn = "978-1-4799-3509-3",

publisher = "IEEE",

pages = "975--978",

booktitle = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014",

address = "United States",

note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

}

Lötters, JC, van der Wouden, EJ, Groenesteijn, J , Sparreboom, W , Lammerink, TSJ & Wiegerink, RJ 2014, Integrated multi-parameter flow measurement system. in 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. IEEE, USA, pp. 975-978, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, California, United States, 26/01/14.

TY - GEN

T1 - Integrated multi-parameter flow measurement system

AU - Lötters, Joost Conrad

AU - van der Wouden, E.J.

AU - Groenesteijn, Jarno

AU - Sparreboom, Wouter

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

N1 - Conference code: 27

PY - 2014/1/26

Y1 - 2014/1/26

N2 - We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.

AB - We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.

KW - EWI-24607

KW - METIS-304039

KW - IR-89881

M3 - Conference contribution

SN - 978-1-4799-3509-3

SP - 975

EP - 978

BT - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

PB - IEEE

CY - USA

T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

Y2 - 26 January 2014 through 30 January 2014

ER -