Integrated multi-parameter flow measurement system

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    10 Citations (Scopus)
    29 Downloads (Pure)

    Abstract

    We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.
    Original languageUndefined
    Title of host publication27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
    Place of PublicationUSA
    PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
    Pages975-978
    Number of pages4
    ISBN (Print)978-1-4799-3509-3
    Publication statusPublished - 26 Jan 2014
    Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States
    Duration: 26 Jan 201430 Jan 2014
    Conference number: 27

    Publication series

    Name
    PublisherIEEE Robotics and Automation Society

    Conference

    Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
    Abbreviated titleMEMS
    CountryUnited States
    CitySan Francisco
    Period26/01/1430/01/14

    Keywords

    • EWI-24607
    • METIS-304039
    • IR-89881

    Cite this

    Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J., & Wiegerink, R. J. (2014). Integrated multi-parameter flow measurement system. In 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 (pp. 975-978). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY.