Abstract
We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.
Original language | Undefined |
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Title of host publication | 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 975-978 |
Number of pages | 4 |
ISBN (Print) | 978-1-4799-3509-3 |
Publication status | Published - 26 Jan 2014 |
Event | 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States Duration: 26 Jan 2014 → 30 Jan 2014 Conference number: 27 |
Publication series
Name | |
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Publisher | IEEE Robotics and Automation Society |
Conference
Conference | 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 |
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Abbreviated title | MEMS |
Country/Territory | United States |
City | San Francisco |
Period | 26/01/14 → 30/01/14 |
Keywords
- EWI-24607
- METIS-304039
- IR-89881