Integrated multi-parameter flow measurement system

Joost Conrad Lötters, E.J. van der Wouden, Jarno Groenesteijn, Wouter Sparreboom, Theodorus S.J. Lammerink, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
15 Downloads (Pure)

Abstract

We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.
Original languageUndefined
Title of host publication27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Place of PublicationUSA
PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
Pages975-978
Number of pages4
ISBN (Print)978-1-4799-3509-3
Publication statusPublished - 26 Jan 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States
Duration: 26 Jan 201430 Jan 2014
Conference number: 27

Publication series

Name
PublisherIEEE Robotics and Automation Society

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated titleMEMS
CountryUnited States
CitySan Francisco
Period26/01/1430/01/14

Keywords

  • EWI-24607
  • METIS-304039
  • IR-89881

Cite this

Lötters, J. C., van der Wouden, E. J., Groenesteijn, J., Sparreboom, W., Lammerink, T. S. J., & Wiegerink, R. J. (2014). Integrated multi-parameter flow measurement system. In 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 (pp. 975-978). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY.
Lötters, Joost Conrad ; van der Wouden, E.J. ; Groenesteijn, Jarno ; Sparreboom, Wouter ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. / Integrated multi-parameter flow measurement system. 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2014. pp. 975-978
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keywords = "EWI-24607, METIS-304039, IR-89881",
author = "L{\"o}tters, {Joost Conrad} and {van der Wouden}, E.J. and Jarno Groenesteijn and Wouter Sparreboom and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.}",
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isbn = "978-1-4799-3509-3",
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Lötters, JC, van der Wouden, EJ, Groenesteijn, J, Sparreboom, W, Lammerink, TSJ & Wiegerink, RJ 2014, Integrated multi-parameter flow measurement system. in 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. IEEE ROBOTICS AND AUTOMATION SOCIETY, USA, pp. 975-978, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, United States, 26/01/14.

Integrated multi-parameter flow measurement system. / Lötters, Joost Conrad; van der Wouden, E.J.; Groenesteijn, Jarno; Sparreboom, Wouter; Lammerink, Theodorus S.J.; Wiegerink, Remco J.

27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2014. p. 975-978.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Integrated multi-parameter flow measurement system

AU - Lötters, Joost Conrad

AU - van der Wouden, E.J.

AU - Groenesteijn, Jarno

AU - Sparreboom, Wouter

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

PY - 2014/1/26

Y1 - 2014/1/26

N2 - We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.

AB - We have designed and realized an integrated multi-parameter flow measurement system, consisting of an integrated Coriolis and thermal flow sensor, and a pressure sensor. The integrated system enables on-chip measurement, analysis and determination of flow and several physical properties of both gases and liquids. With the system, we demonstrated the feasibility to measure the flow rate, density, viscosity, specific heat capacity and thermal conductivity of hydrogen, helium, nitrogen, air, argon, water and IPA.

KW - EWI-24607

KW - METIS-304039

KW - IR-89881

M3 - Conference contribution

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BT - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

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Lötters JC, van der Wouden EJ, Groenesteijn J, Sparreboom W, Lammerink TSJ, Wiegerink RJ. Integrated multi-parameter flow measurement system. In 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. 2014. p. 975-978