Integrated Optical Filters based on Microring Resonators

This thesis describes work on microring resonator devices based on Silicon Oxynitride technology carried out in the Dutch BTS and European NAIS project. In the beginning only single ring devices have been considered in order to develop the fabrication technology as well as design and measurement methods and gain a deep understanding of the functional behavior. Later more complex devices consisting of cascaded multiple microring resonators in a parallel configuration with a promising functionality have been realized and demonstrated.