Integrated pressure sensing using capacitive Coriolis mass flow sensors

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    The cross-sectional shape of microchannels is, dependent on the fabrication method, never perfectly circular. Consequently, the channels deform with the pressure, which is a non-ideal effect in flow sensors, but may be used for pressure sensing. Multiple suspended channels with different lengths were modeled, fabricated, and characterized to verify the use and the scalability of this effect for pressure sensing. Furthermore, it is shown that the pressure dependence can be distinguished from the Coriolis effect in microfabricated Coriolis mass flow sensors, enabling the measurement of the pressure next to flow and density with only the flow sensor itself. In addition, this allows for further improvement in the accuracy of the flow measurement by correcting for the small pressure dependence.
    Original languageEnglish
    Pages (from-to)653-661
    Number of pages9
    JournalJournal of microelectromechanical systems
    Issue number3
    Publication statusPublished - 2 Jun 2017


    • Pressure sensing
    • Coriolis flow sensor
    • Multi parameter system
    • Differential pressure flow sensing
    • Microfluidics
    • Surface Channel Technology (SCT)
    • 22/3 OA procedure


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