Fingerprint
Dive into the research topics of 'Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing
Jos Benschop, Andre Engelen, Hugo Cramer, Michael Kubis, Paul Hinnen, Hans van der Laan, Kaustuve Bhattacharyya, Jan Mulkens
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
24
Citations
(Scopus)