Abstract
A micro-bimorph cantilever is monolithically
integrated with a photonic crystal micro-cavity based
device, using surface micro-machining techniques. The
integrated cantilever is equipped with self-aligned
dielectric tips with respect to the holes of the photonic
crystal and on electrostatic actuation, the tips move into
the holes, providing electro-opto-mechanical modulation
of guided waves. The device is designed to operate in the
C-band of the telecommunication wavelengths and
constitute a promising candidate for future integrated
optical devices.
Original language | Undefined |
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Title of host publication | 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 2534-2537 |
Number of pages | 4 |
ISBN (Print) | 978-1-4577-0156-6 |
DOIs | |
Publication status | Published - 5 Jun 2011 |
Event | 16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/ |
Publication series
Name | |
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Publisher | IEEE Photonics Society |
Conference
Conference | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
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Abbreviated title | TRANSDUCERS 2011 |
Country/Territory | China |
City | Beijing |
Period | 5/06/11 → 9/06/11 |
Internet address |
Keywords
- METIS-277702
- IR-77628
- Micro-bimorph
- electromechano-optical modulation
- EWI-20301
- wavelength tuning
- band edge tuning
- monolithic integration
- photonic crystal micro-cavity
- self aligned tips