Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    A micro-bimorph cantilever is monolithically integrated with a photonic crystal micro-cavity based device, using surface micro-machining techniques. The integrated cantilever is equipped with self-aligned dielectric tips with respect to the holes of the photonic crystal and on electrostatic actuation, the tips move into the holes, providing electro-opto-mechanical modulation of guided waves. The device is designed to operate in the C-band of the telecommunication wavelengths and constitute a promising candidate for future integrated optical devices.
    Original languageUndefined
    Title of host publication16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11
    Place of PublicationUSA
    Number of pages4
    ISBN (Print)978-1-4577-0156-6
    Publication statusPublished - 5 Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16

    Publication series

    PublisherIEEE Photonics Society


    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    Internet address


    • METIS-277702
    • IR-77628
    • Micro-bimorph
    • electromechano-optical modulation
    • EWI-20301
    • wavelength tuning
    • band edge tuning
    • monolithic integration
    • photonic crystal micro-cavity
    • self aligned tips

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