Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers

Shahrzad Zahertar; Ran Tao; Hamdi Torun; Pep Canyelles-Pericas; Yong Qing Fu

doi:10.1109/FLEPS51544.2021.9469755

Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers

Shahrzad Zahertar^*, Ran Tao, Hamdi Torun, Pep Canyelles-Pericas, Yong Qing Fu

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

68 Downloads (Pure)

Abstract

Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.

Original language	English
Title of host publication	2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)
Place of Publication	Piscataway, NJ
Publisher	IEEE
ISBN (Electronic)	978-1-7281-9173-7
ISBN (Print)	978-1-7281-9174-4
DOIs	https://doi.org/10.1109/FLEPS51544.2021.9469755
Publication status	Published - 20 Jun 2021
Event	IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021 - Virtual Conference, Manchester, United Kingdom Duration: 20 Jun 2021 → 23 Jun 2021 https://2021.ieee-fleps.org/

Conference

Conference	IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021
Abbreviated title	FLEPS 2021
Country/Territory	United Kingdom
City	Manchester
Period	20/06/21 → 23/06/21
Internet address	https://2021.ieee-fleps.org/

Keywords

Microfluidic actuation
Surface Acoustic Waves (SAWs)
2023 OA procedure

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10.1109/FLEPS51544.2021.9469755

ArticleFinal published version, 1.57 MBLicence: Taverne

Cite this

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title = "Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers",

abstract = "Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.",

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author = "Shahrzad Zahertar and Ran Tao and Hamdi Torun and Pep Canyelles-Pericas and Fu, {Yong Qing}",

note = "Funding Information: ACKNOWLEDGMENT The This work was supported by the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) - Special Interest Group of Acoustofluidics. Publisher Copyright: {\textcopyright} 2021 IEEE.; IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021, FLEPS 2021 ; Conference date: 20-06-2021 Through 23-06-2021",

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Zahertar, S, Tao, R, Torun, H, Canyelles-Pericas, P & Fu, YQ 2021, Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers. in 2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)., 9469755, IEEE, Piscataway, NJ, IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021, Manchester, United Kingdom, 20/06/21. https://doi.org/10.1109/FLEPS51544.2021.9469755

Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers. / Zahertar, Shahrzad; Tao, Ran; Torun, Hamdi et al.
2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS). Piscataway, NJ: IEEE, 2021. 9469755.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers

AU - Zahertar, Shahrzad

AU - Tao, Ran

AU - Torun, Hamdi

AU - Canyelles-Pericas, Pep

AU - Fu, Yong Qing

N1 - Funding Information: ACKNOWLEDGMENT The This work was supported by the Engineering Physics and Science Research Council of UK (EPSRC EP/P018998/1) and UK Fluidic Network (EP/N032861/1) - Special Interest Group of Acoustofluidics. Publisher Copyright: © 2021 IEEE.

PY - 2021/6/20

Y1 - 2021/6/20

N2 - Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.

AB - Flexible and bendable devices have become the key elements in the development of next-generation point-of-care systems and wearable technologies. In this paper, we report flexible surface acoustic wave (SAW) devices that are composed of a multilayer substrate; SAW devices are basically made of interdigital transducers (IDTs) that are patterned on a piezoelectric layer. In our fabricated devices, thin film of zinc oxide (ZnO), as the piezoelectric layer, is deposited on substrates made of trilayer of thin metal films (Nickel/Copper/Nickel) on top of a polyethylene terephthalate (PET) layer. We have characterized the devices in radio frequencies, and we have measured the response of the device to the temperature and the Ultraviolet (UV) light. Also, we have tested the actuation capability of our fabricated devices. We have successfully demonstrated that our fabricated devices can be employed as an integrated platform for sensing and actuation purposes using a single structure.

KW - Microfluidic actuation

KW - Surface Acoustic Waves (SAWs)

KW - 2023 OA procedure

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DO - 10.1109/FLEPS51544.2021.9469755

M3 - Conference contribution

AN - SCOPUS:85114127046

SN - 978-1-7281-9174-4

BT - 2021 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS)

PB - IEEE

CY - Piscataway, NJ

T2 - IEEE International Conference on Flexible and Printable Sensors and Systems, FLEPS 2021

Y2 - 20 June 2021 through 23 June 2021

ER -

Integrated Sensing and Actuation Capabilities of Flexible Surface Acoustic Wave Devices with Metallic and Polymer Layers

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