Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades

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    We have realized a micromachined single chip flow sensing system with an unprecedented ultra-wide dynamic flow range of more than 4 decades, from less than 0.1 up to more than 1000 μl/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges. Operation principle The thermal flow sensor, as shown in figure 1a, consists of a silicon nitride microchannel that is freely-suspended over an etched cavity in the silicon substrate. Two resistors, that fulfill both the heating and sensing function, are positioned on each channel segment. The resistors are connected in a Wheatstone bridge configuration. A flow through the channel results in a corresponding output voltage of the Wheatstone bridge. A Coriolis type flow sensor consists of a vibrating tube. Fluid flow inside the vibrating tube results in Coriolis forces that can be detected. The tube is actuated using Lorentz forces in a torsional mode indicated by ωam. A mass flow Φm inside the tube results in a Coriolis force Fc. The Coriolis force is capacitively detected by its induced out of plane vibration mode with an amplitude proportional to the mass flow.
    Original languageEnglish
    Number of pages1
    Publication statusPublished - 15 Nov 2011
    EventNetherlands MicroNanoConference 2011 - Ede, Netherlands
    Duration: 15 Nov 201116 Nov 2011


    ConferenceNetherlands MicroNanoConference 2011


    • METIS-285071
    • EWI-21399
    • IR-79527


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