Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

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    Abstract

    We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
    Original languageUndefined
    Pages (from-to)194-203
    Number of pages10
    JournalMicromachines
    Volume3
    Issue number1
    DOIs
    Publication statusPublished - 15 Mar 2012

    Keywords

    • METIS-293275
    • EWI-22790
    • IR-83475

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