Abstract
We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
Original language | English |
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Pages (from-to) | 194-203 |
Number of pages | 10 |
Journal | Micromachines |
Volume | 3 |
Issue number | 1 |
DOIs | |
Publication status | Published - 15 Mar 2012 |
Keywords
- UT-Gold-D