Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Joost Conrad Lötters; Theodorus S.J. Lammerink; Jarno Groenesteijn; J. Haneveld; Remco J. Wiegerink

doi:10.3390/mi3010194

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Joost Conrad Lötters, Theodorus S.J. Lammerink, Jarno Groenesteijn, J. Haneveld, Remco J. Wiegerink

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Abstract

We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

Original language	English
Pages (from-to)	194-203
Number of pages	10
Journal	Micromachines
Volume	3
Issue number	1
DOIs	https://doi.org/10.3390/mi3010194
Publication status	Published - 15 Mar 2012

Keywords

UT-Gold-D

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10.3390/mi3010194Licence: CC BY

ArticleFinal published version, 616 KBLicence: CC BY

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title = "Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades",

abstract = "We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.",

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author = "L{\"o}tters, \{Joost Conrad\} and Lammerink, \{Theodorus S.J.\} and Jarno Groenesteijn and J. Haneveld and Wiegerink, \{Remco J.\}",

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AU - Lötters, Joost Conrad

AU - Lammerink, Theodorus S.J.

AU - Groenesteijn, Jarno

AU - Haneveld, J.

AU - Wiegerink, Remco J.

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Y1 - 2012/3/15

N2 - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

AB - We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.

KW - UT-Gold-D

U2 - 10.3390/mi3010194

DO - 10.3390/mi3010194

M3 - Article

SN - 2072-666X

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SP - 194

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JO - Micromachines

JF - Micromachines

IS - 1

ER -

Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

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