Integrated throughflow mechanical microfluidic sensors

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    943 Downloads (Pure)


    For many medical and industrial applications, measurement of flow is essential for continuous dosing of fluids. When other physical quantities of fluids are sensed next to flow, e.g. density and viscosity, the composition of the fluid can be obtained. Miniaturization of these sensors using microtechnology offers advantages in terms of resolution, mass production, channel wall material and internal volume.

    The research described in this dissertation spans roughly two subjects:
    • resolution limit analysis and improvement of microfabricated Coriolis mass flow sensors;
    • Integration of flow, pressure, density, viscosity and relative permittivity sensors on a single chip.
    Original languageEnglish
    Awarding Institution
    • University of Twente
    • Lötters, Joost Conrad, Supervisor
    • Wiegerink, Remco J., Co-Supervisor
    Award date6 Apr 2018
    Place of PublicationEnschede
    Print ISBNs978-90-365-4515-0
    Publication statusPublished - 6 Apr 2018


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