Integrated throughflow mechanical microfluidic sensors

Dennis Alveringh

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

204 Downloads (Pure)

Abstract

For many medical and industrial applications, measurement of flow is essential for continuous dosing of fluids. When other physical quantities of fluids are sensed next to flow, e.g. density and viscosity, the composition of the fluid can be obtained. Miniaturization of these sensors using microtechnology offers advantages in terms of resolution, mass production, channel wall material and internal volume.

The research described in this dissertation spans roughly two subjects:
• resolution limit analysis and improvement of microfabricated Coriolis mass flow sensors;
• Integration of flow, pressure, density, viscosity and relative permittivity sensors on a single chip.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Lötters, Joost Conrad, Supervisor
  • Wiegerink, Remco J., Co-Supervisor
Award date6 Apr 2018
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-4515-0
DOIs
Publication statusPublished - 6 Apr 2018

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Microfluidics
Fluids
Sensors
Viscosity
Medical applications
Industrial applications
Permittivity
Chemical analysis

Cite this

Alveringh, Dennis . / Integrated throughflow mechanical microfluidic sensors. Enschede : University of Twente, 2018. 216 p.
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Integrated throughflow mechanical microfluidic sensors. / Alveringh, Dennis .

Enschede : University of Twente, 2018. 216 p.

Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

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AB - For many medical and industrial applications, measurement of flow is essential for continuous dosing of fluids. When other physical quantities of fluids are sensed next to flow, e.g. density and viscosity, the composition of the fluid can be obtained. Miniaturization of these sensors using microtechnology offers advantages in terms of resolution, mass production, channel wall material and internal volume.The research described in this dissertation spans roughly two subjects:• resolution limit analysis and improvement of microfabricated Coriolis mass flow sensors;• Integration of flow, pressure, density, viscosity and relative permittivity sensors on a single chip.

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