Abstract
For many medical and industrial applications, measurement of flow is essential for continuous dosing of fluids. When other physical quantities of fluids are sensed next to flow, e.g. density and viscosity, the composition of the fluid can be obtained. Miniaturization of these sensors using microtechnology offers advantages in terms of resolution, mass production, channel wall material and internal volume.
The research described in this dissertation spans roughly two subjects:
• resolution limit analysis and improvement of microfabricated Coriolis mass flow sensors;
• Integration of flow, pressure, density, viscosity and relative permittivity sensors on a single chip.
The research described in this dissertation spans roughly two subjects:
• resolution limit analysis and improvement of microfabricated Coriolis mass flow sensors;
• Integration of flow, pressure, density, viscosity and relative permittivity sensors on a single chip.
| Original language | English |
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| Award date | 6 Apr 2018 |
| Place of Publication | Enschede |
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| Print ISBNs | 978-90-365-4515-0 |
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| Publication status | Published - 6 Apr 2018 |