Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    3 Citations (Scopus)

    Abstract

    Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.
    Original languageUndefined
    Title of host publicationProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages644-648
    Number of pages5
    ISBN (Print)90-73461-33-2
    Publication statusPublished - 29 Nov 2002
    EventSESENS 2002 - Veldhoven, Netherlands
    Duration: 29 Nov 200230 Nov 2002

    Workshop

    WorkshopSESENS 2002
    CountryNetherlands
    CityVeldhoven
    Period29/11/0230/11/02

    Keywords

    • EWI-15595
    • METIS-207488
    • IR-43817

    Cite this

    Le Minh, P., Holleman, J., Berenschot, J. W., Tas, N. R., & van den Berg, A. (2002). Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 (pp. 644-648). Utrecht, The Netherlands: STW.