Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Citations (Scopus)

Abstract

Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.
Original languageUndefined
Title of host publicationProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
Place of PublicationUtrecht, The Netherlands
PublisherSTW
Pages644-648
Number of pages5
ISBN (Print)90-73461-33-2
Publication statusPublished - 29 Nov 2002
EventSESENS 2002 - Veldhoven, Netherlands
Duration: 29 Nov 200230 Nov 2002

Workshop

WorkshopSESENS 2002
CountryNetherlands
CityVeldhoven
Period29/11/0230/11/02

Keywords

  • EWI-15595
  • METIS-207488
  • IR-43817

Cite this

Le Minh, P., Holleman, J., Berenschot, J. W., Tas, N. R., & van den Berg, A. (2002). Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 (pp. 644-648). Utrecht, The Netherlands: STW.
Le Minh, P. ; Holleman, J. ; Berenschot, Johan W. ; Tas, Niels Roelof ; van den Berg, Albert. / Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands : STW, 2002. pp. 644-648
@inproceedings{5e1cef2853bb4a88ac4ab94f852f9889,
title = "Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector",
abstract = "Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.",
keywords = "EWI-15595, METIS-207488, IR-43817",
author = "{Le Minh}, P. and J. Holleman and Berenschot, {Johan W.} and Tas, {Niels Roelof} and {van den Berg}, Albert",
year = "2002",
month = "11",
day = "29",
language = "Undefined",
isbn = "90-73461-33-2",
pages = "644--648",
booktitle = "Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002",
publisher = "STW",

}

Le Minh, P, Holleman, J, Berenschot, JW, Tas, NR & van den Berg, A 2002, Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. in Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. STW, Utrecht, The Netherlands, pp. 644-648, SESENS 2002, Veldhoven, Netherlands, 29/11/02.

Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. / Le Minh, P.; Holleman, J.; Berenschot, Johan W.; Tas, Niels Roelof; van den Berg, Albert.

Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands : STW, 2002. p. 644-648.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector

AU - Le Minh, P.

AU - Holleman, J.

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - van den Berg, Albert

PY - 2002/11/29

Y1 - 2002/11/29

N2 - Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.

AB - Light emitting diode antifuse has been integrated into a microfluidic device that is realized with extended standard CMOS technological steps. The device comprises of a microchannel sandwiched between a photodiode detector and a nanometer-scale diode antifuse light emitter. Within this contribution, the device fabrication process, working principle and properties will be discussed. Change in the interference fringe of the antifuse spectra has been measured due to the filling of the channel. Preliminary applications are electroosmotic flow speed measurement, detection of absorptivity of liquids in the channel.

KW - EWI-15595

KW - METIS-207488

KW - IR-43817

M3 - Conference contribution

SN - 90-73461-33-2

SP - 644

EP - 648

BT - Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002

PB - STW

CY - Utrecht, The Netherlands

ER -

Le Minh P, Holleman J, Berenschot JW, Tas NR, van den Berg A. Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands: STW. 2002. p. 644-648