Integration of laser-annealed junctions in a low-temperature high-k metal-gate MISFET

Cleber Biasotto*, Vladimir Jovanović, Viktor Gonda, Johan Van Der Cingel, Silvana Milosavljević, Lis K. Nanver

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

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Engineering & Materials Science