Integration of Micro-cantilevers with Photonic Structures for Mechano-optical Wavelength Selective Devices

S.M. Chakkalakkal Abdulla

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    114 Downloads (Pure)


    This thesis deals with the fabrication technology and mechano-optical characterisation of compact integrated wavelength selective optical devices for use in telecommunication applications. Upon electrostatic actuation, a mechanical element perturbs the optical evanescent field of a guided wave providing electro mechano-optical modulation of light. The silicon-on-insulator (SOI) based optical devices are fabricated in a silicon photonics fabrication platform called ePIXfab using deep-UV lithography. Further, using surface micromaching techniques, the mechanical elements are monolithically integrated with the optical devices in the MESA+ Cleanroom. Mechanooptical modulation is investigated in three different types of optical devices, viz. a microring resonator, a photonic crystal slab waveguide and a photonic crystal microcavity based device. Owing to their ease of fabrication and low power consumption, electrostatically actuated curled micro-bimorph cantilevers are chosen as the mechanical perturbing element. The thesis concentrates on the characterisation of the mechanical elements, the development of integration technologies and mechano-optical characterisation of the integrated devices.
    Original languageUndefined
    Awarding Institution
    • University of Twente
    • Krijnen, G. , Supervisor
    Thesis sponsors
    Award date6 Apr 2011
    Place of PublicationZutphen
    Print ISBNs978-90-365-3176-4
    Publication statusPublished - 6 Apr 2011


    • EWI-20205
    • METIS-284895
    • IR-77238

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