Integration of planar SION/SiO2 waveguide with silicon photodiode

J. Niehof, R.M. de Ridder, H. Albers, Paul Lambeck, A.J. Mouthaan

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication5th Sensors & Actuators Symposium
    Place of PublicationEnschede
    Number of pages4
    Publication statusPublished - 15 Nov 1990


    • METIS-114389

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