Integration of planar SION/SiO2 waveguide with silicon photodiode

J. Niehof, R.M. de Ridder, H. Albers, Paul Lambeck, A.J. Mouthaan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	5th Sensors & Actuators Symposium
Place of Publication	Enschede
Pages	83-86
Number of pages	4
Publication status	Published - 15 Nov 1990

Keywords

@inproceedings{9fb04dbcf23c4035863e7ec47032a488,

title = "Integration of planar SION/SiO2 waveguide with silicon photodiode",

keywords = "METIS-114389",

author = "J. Niehof and \{de Ridder\}, R.M. and H. Albers and Paul Lambeck and A.J. Mouthaan",

year = "1990",

month = nov,

day = "15",

language = "Undefined",

isbn = "9020124668",

pages = "83--86",

booktitle = "5th Sensors \& Actuators Symposium",

}