Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

J. Lu; Alexeij Y. Kovalgin; Karine H.M. van der Werf; Ruud E.I. Schropp; Jurriaan Schmitz

doi:10.1109/TED.2011.2143716

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

J. Lu
, Alexeij Y. Kovalgin
, Karine H.M. van der Werf
, Ruud E.I. Schropp
, Jurriaan Schmitz

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

We present the monolithic integration of deepsubmicrometer complementary metal–oxide–semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust‿).

Original language	English
Pages (from-to)	2014-2021
Number of pages	8
Journal	IEEE Transactions on Electron Devices
Volume	58
Issue number	5
DOIs	https://doi.org/10.1109/TED.2011.2143716
Publication status	Published - 1 Jul 2011

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

photovoltaic (PV) cells
monolithic integration
solar cells
EWI-20362
METIS-277732
complementary metal–oxide–semiconductor (CMOS)
Above integrated circuit (IC)
Energy harvesting
amorphous Si (a-Si)
Ubiquitous Computing
energy scavenging
IR-77759

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Lu_TEDSubmitted version, 813 KBLicence: Unspecified

Cite this

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title = "Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells",

abstract = "We present the monolithic integration of deepsubmicrometer complementary metal–oxide–semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7\%. The yield of photovoltaic cells on planarized CMOS chips is 92\%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust‿).",

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AU - Lu, J.

AU - Kovalgin, Alexeij Y.

AU - van der Werf, Karine H.M.

AU - Schropp, Ruud E.I.

AU - Schmitz, Jurriaan

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AB - We present the monolithic integration of deepsubmicrometer complementary metal–oxide–semiconductor (CMOS) microchips with a-Si:H solar cells. Solar cells are manufactured directly on the CMOS chips. The microchips maintain comparable electronic performance, and the solar cells show efficiency values above 7%. The yield of photovoltaic cells on planarized CMOS chips is 92%. This integration allows integrated energy harvesting using established process technologies and, as such, is an important step toward wireless autonomous microsystems (i.e., “smart dust‿).

KW - photovoltaic (PV) cells

KW - monolithic integration

KW - solar cells

KW - EWI-20362

KW - METIS-277732

KW - complementary metal–oxide–semiconductor (CMOS)

KW - Above integrated circuit (IC)

KW - Energy harvesting

KW - amorphous Si (a-Si)

KW - Ubiquitous Computing

KW - energy scavenging

KW - IR-77759

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DO - 10.1109/TED.2011.2143716

M3 - Article

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VL - 58

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JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

IS - 5

ER -

Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells

Abstract

UN SDGs

Keywords

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