Integration of trench isolation technology and plasma release for advanced MEMS design on standard silicon wafers

Edin Sarajlic, Meint J. de Boer, N. Arnal, M. Puech, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 2 Oct 2003
Event	MESA+ Day 2003 - University of Twente, Enschede, Netherlands Duration: 2 Oct 2003 → 2 Oct 2003

Keywords

@conference{cfb12e1ccefd45ba983852c563d78542,

title = "Integration of trench isolation technology and plasma release for advanced MEMS design on standard silicon wafers",

keywords = "METIS-216937",

author = "Edin Sarajlic and {de Boer}, {Meint J.} and N. Arnal and M. Puech and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "2003",

month = oct,

day = "2",

language = "English",

pages = "--",

note = "MESA+ Day 2003 ; Conference date: 02-10-2003 Through 02-10-2003",

}

TY - CONF

T1 - Integration of trench isolation technology and plasma release for advanced MEMS design on standard silicon wafers

AU - Sarajlic, Edin

AU - de Boer, Meint J.

AU - Arnal, N.

AU - Puech, M.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2003/10/2

Y1 - 2003/10/2

KW - METIS-216937

M3 - Poster

SP - -

T2 - MESA+ Day 2003

Y2 - 2 October 2003 through 2 October 2003

ER -