Integrierte piezosensitive und Kapazitive Ein-Chip-Silizium-Mikrofone

Research output: Thesis › PhD Thesis - Research external, graduation UT

Original language	Undefined
Supervisors/Advisors	Sessler, G.M., Supervisor, External person Bergveld, Piet, Advisor Langheinrich, W., Advisor, External person
Award date	23 May 1997
Place of Publication	Darmstadt
Publisher	Technische Hochschule Darmstadt, Fachbereich Elektrotechnike
Publication status	Published - 23 May 1997

Keywords

@phdthesis{df4cae0cf43f40bcb6b6eb8fc7b8aa3d,

title = "Integrierte piezosensitive und Kapazitive Ein-Chip-Silizium-Mikrofone",

keywords = "METIS-111402",

author = "R. Schellin",

year = "1997",

month = may,

day = "23",

language = "Undefined",

publisher = "Technische Hochschule Darmstadt, Fachbereich Elektrotechnike",

type = "PhD Thesis - Research external, graduation UT",

}