Intelligent gas-mixture flow sensor

Theo S.J. Lammerink, Fred Dijkstra, Zweitze Houkes, J.C.C. van Kuijk, Joost van Kuijk

    Research output: Contribution to journalArticleAcademicpeer-review

    39 Citations (Scopus)
    73 Downloads (Pure)

    Abstract

    A simple way to realize a gas-mixture flow sensor is presented. The sensor is capable of measuring two parameters from a gas flow. Both the flow rate and the helium content of a helium-nitrogen gas mixture are measured. The sensor exploits two measurement principles in combination with (local) information handling in an artificial neural network. An analysis of the measurement principles is given and the IC-compatible realization process is described. The sensor is simple to integrate with other micro gas-handling components such as valves, pressure sensors, etc. The sensing elements are combined with a small electronic circuit in which the artificial neural network is implemented. The experimental results are very promising.
    Original languageEnglish
    Pages (from-to)380-384
    Number of pages5
    JournalSensors and actuators. A: Physical
    Volume47
    Issue number1-3
    DOIs
    Publication statusPublished - Mar 1995

    Keywords

    • Flow sensors
    • Gas mixtures
    • Intelligent sensors

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